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Microelectromechanical (MEMS) Device Specimen Preparation
(Class 4 Procedures)

Metallographic Class 4 sample preparation


Microelectromechanical systems (MEMS) devices are also referred to as micromachines. MEMS devices are made up of components varying in size between 1 micron to 0.1 mm.

Microstructural cross section preparation of MEMS devices presents the same challenges as polishing other specimens having material properties ranging from very hard and brittle (silicon, ceramics, etc.) to soft and ductile (soft metals, metallized layers, sputter coating, etc.). Specimen preparation must eliminate any preparation induced artifacts, as well as maintain the planarity of the specimen.

SECTIONING

Diamond wafering blade - medium grit/low concentration (if required)

MOUNTING

Castable epoxy or acrylic resins

POLISHING

Abrasive/surface

Lubricant

Force/ sample

Speed
(Head/base)

Time

Individual
Force mode

Central Force
mode

360 grit SiC paper*

Water

5-10 lbs

200/200 rpm

Until plane

 

600 grit SiC gridning paper

Water

5-10 lbs

100/100 rpm

2 minutes

Metallographic individual polishing force

1 um DIAMAT diamond on TEXPAN polishing pad

SIAMAT colloidal silica

5-10 lbs

100/100 rpm

3-5 minutes

Metallographic individual polishing force

SIAMAT colloidal silica on a BLACKCHEM 2 polishing pad

 

5-10 lbs

100/100 rpm

3-5 minutes

Metallographic individual polishing force

*Required for central polishing force. Click here for more information on central vs. individual polishing force polishing.

Aluminum silicon substrate MEMS device with a gold bond on a nickel layer

Aluminum-silicon substrate MEMS device with a gold bond on a nickel intermediate layer, Mag. 200X, as polished

Electronic die cross section microstructure

Wire bond for MEMS device, 200X, as polished

ETCHING

Common Etchants
PACE Technologies Recommended Etchants

PACE Technologies Etchant Database

CAUTION:Safety is very important when etching. Be sure to wear the appropriate protective clothing and observe all WARNINGS on chemical manufacuters SDS (Safety Data Sheets). Also review the COMMENTS and CONDITIONS Section for each etchant.


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3601 E. 34th St.
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email: pace@metallographic.com
www.metallographic.com


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Metallographic
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