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Piezoelectric (PZT) Device
Specimen Preparation (Class 4 Procedures)
Metallographic Class 4 sample preparation  

PZT, or piezoelectric, devices are very useful because they generate a voltage when mechanically deformed or vice versa.

PZT's are typically composed of lead, zirconium and titanate, which are processed at extremely high temperatures. PZT devices present the same challenges as polishing other brittle materials; however, they present the additional challenge of preparing other materials with significantly different properties (packaging materials, solders, coating, etc.). Specimen preparation must eliminate the preparation induced artifacts, as well as maintain the planarity of the specimen.

SECTIONING
Diamond wafering blade - medium grit/low concentration (if required)

MOUNTING
Castable epoxy or acrylic resins

POLISHING
Abrasive/surface Lubricant Force/ sample Speed
(Head/base)
Time Individual
Force mode
Central Force
mode
600 grit SiC paper
Water
5-10 lbs 200/200 rpm Planar
  Metallographic central polishing force
1200 grit SiC paper Water
5-10 lbs 100/100 rpm 2 min
Metallographic individual polishing force Metallographic central polishing force
1 um DIAMAT diamond
on GOLDPAD polishing pad
  5-10 lbs 100/100 rpm 3-5 min Metallographic individual polishing force Metallographic central polishing force
0.05 micron Nanometer
Alumina on BLACKCHEM 2
polishing pad
  10 lbs 100/100 rpm 3-5 min Metallographic individual polishing force Metallographic central polishing force
SIAMAT colloidal silica
on a BLACKCHEM 2
polishing pad
  5-10 lbs 100/100 rpm 1 min Metallographic individual polishing force Metallographic central polishing force

*Required for central polishing force. Click here for more information on central vs. individual polishing force polishing.

PZT cross section
PZT cross section with sputter coating, 200,000X, as polished
PZT void
Undesirable void in PZT, 31,000X, as polished

ETCHING

Common Etchants
PACE Technologies Recommended Etchants

PACE Technologies Etchant Database

CAUTION:Safety is very important when etching. Be sure to wear the appropriate protective clothing and observe all WARNINGS on chemical manufacuters SDS (Safety Data Sheets). Also review the COMMENTS and CONDITIONS Section for each etchant.


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