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Silicon Substrate Specimen Preparation
(Class 4 Procedures)

Metallographic Class 4 sample preparation


Specimen preparation of friable or brittle materials such as silicon offer a microstructural preparation challenge. Proper microstructural preparation of these materials must minimize fracturing the silicon structure. This is accomplished by first by cutting or sectioning with fine grit / low concentration diamond blades. Oftentimes microelectronic cross sections are not encapsulated and just mounted using a hot melt tape. If the specimens are encapsulated, a castable mounting compound such as an acrylic or an epoxy is recommended. Initial grinding and polishing with diamond lapping films is required to prevent undue damage to the silicon during grinding. Rough polishing is accomplished on low napped polishing cloths using diamond, with final polishing for a very short time on a high napped cloth using collodial silica.

SECTIONING

Diamond Wafering blade - fine grit / low concentration

MOUNTING

Hot melt tape or castable mounting with Epoxy or Acrylic resins

POLISHING

Abrasive/surface

Lubricant

Force/ sample

Speed
(Head/base)

Time

15 um Diamond Lapping Film POLYLUBE Diamond Extender 5 lbs

200/200 rpm

3 minutes
9 um Diamond Lapping Film POLYLUBE Diamond Extender 5 lbs 200/200 rpm 2 minutes
6 um Diamond Lapping Film POLYLUBE Diamond Extender 5 lbs 200/200 rpm 2 minutes
3 um Diamond Lapping Film POLYLUBE Diamond Extender 5 lbs 200/200 rpm 2 minutes

1 um DIAMAT Diamond on ATLANTIS polishing pad

DIALUBE Purple Lubricant

5 lbs

200/200 rpm

1 minute

Colloidal silica on MICROPAD or MICROPAD 2 polishing pad   5 lbs 200/200 rpm 30 seconds

Metallographic cutting with fine grit diamond wafering blade   Metallographic diamond cutting with incorrect wafering blade

Figure 1. Fine grit diamond cut

 

Figure 2. Medium grit diamond

Electronic package   Electronic package

Figure 3. Electronic package

 

Figure 4. Electronic package

ETCHING

Common Etchants
PACE Technologies Recommended Etchants

PACE Technologies Etchant Database

CAUTION:Safety is very important when etching. Be sure to wear the appropriate protective clothing and observe all WARNINGS on chemical manufacuters SDS (Safety Data Sheets). Also review the COMMENTS and CONDITIONS Section for each etchant.


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3601 E. 34th St.
Tucson, Arizona 85713
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FAX +1-520-882-6599
email: pace@metallographic.com
www.metallographic.com


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Metallographic
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